Subsurface damage pattern and formation mechanism of monocrystalline β-Ga2O3 in grinding process
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering
Link
https://link.springer.com/content/pdf/10.1007/s11465-022-0677-3.pdf
Reference42 articles.
1. Pearton S J, Yang J C, Cary P H IV, Ren F, Kim J, Tadjer M J, Mastro M A. A review of Ga2O3 materials, processing, and devices. Applied Physics Reviews, 2018, 5(1): 011301
2. Gao S, Li H G, Kang R K, He Y W, Zhu X L. Recent advance in preparation and ultra-precision machining of new generation semiconductor material of β-Ga2O3 single crystals. Journal of Mechanical Engineering, 2021, 57(9): 213–232 (in Chinese)
3. Higashiwaki M. β-gallium oxide devices: progress and outlook. Physica Status Solidi, 2021, 15(11): 2100357
4. Kaur D, Kumar M. A strategic review on gallium oxide based deep-ultraviolet photodetectors: recent progress and future prospects. Advanced Optical Materials, 2021, 9(9): 2002160
5. Zhou H, Zhang J C, Zhang C F, Feng Q, Zhao S L, Ma P J, Hao Y. A review of the most recent progresses of state-of-art gallium oxide power devices. Journal of Semiconductors, 2019, 40(1): 011803
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