Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Metals and Alloys,Physical and Theoretical Chemistry,Condensed Matter Physics
Reference32 articles.
1. Yamagishi H, Kuramoto M, Shiraishi Y, Machida N, Takano K, Takase N, Iida T, Matsubara J, Minami H, Imai M, Takada K. Large diameter silicon technology and epitaxy. Microelectron Eng. 1999;45(2–3):101.
2. Shiraishi Y, Takano K, Matsubara J, Iida T, Takase N, Machida N, Kuramoto M, Yamagishi H. Growth of silicon crystal with a diameter of 400 mm and weight of 400 kg. J Cryst Growth. 2001;229(1):17.
3. Oishi H, Asakawa K, Matsuzaki J, Ashida A. Development of water soluble coolant for multi wire saw slicing of 400 mm diameter silicon. In: 14th Annual Meeting of the American Society for Precision Engineering. Nice; 1999. 231.
4. Takano K, Shiraishi Y, Takase N, Matsubara J, Machida N, Kuramoto M, Yamagishi H. Numerical simulation for silicon crystal growth of up to 400 mm diameter in Czochralski furnaces. Mater Sci Eng B. 2000;73(73):30.
5. Takano K, Shiraishi Y, Matsubara J, Iida T, Takase N, Machida N, Kuramoto M, Yamagishi H. Global simulation of the CZ silicon crystal growth up to 400 mm in diameter. J Cryst Growth. 2001;229(1):26.
Cited by
6 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献