The Effect of Physical Property Parameters of the Insulation Material Inside the Heat Shield on the Growth of Czochralski Silicon Crystal-Reference-Cited by-同舟云学术

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The Effect of Physical Property Parameters of the Insulation Material Inside the Heat Shield on the Growth of Czochralski Silicon Crystal

Published:2023-11-28 Issue: Volume: Page:
ISSN:1876-990X
Container-title:Silicon
language:en
Short-container-title:Silicon

Author:

Hu Rongrong,Lv Xuekang,Li Jiacheng,Ali Salamat,Qi Jing

Funder

Natural Science Foundation of Gansu Province

Publisher

Springer Science and Business Media LLC

Subject

Electronic, Optical and Magnetic Materials

Link

https://link.springer.com/content/pdf/10.1007/s12633-023-02778-9.pdf

Reference28 articles.

1. Hossain MM, Watauchi S, Nagao M et al (2014) Effects of lamp power and mirror position on the interface shape of the silicon molten zone during infrared convergent heating. Cryst Eng Comm 16(21):4619–4623. https://doi.org/10.1039/c4ce00235k

2. Hossain MM, Watauchi S, Nagao M et al (2014) Feed size dependence of position effects of mirror-lamp system on shape of silicon crystal during its growth by mirror-shifting-type infrared convergent-heating floating zone method. Cryst Growth Des 14(10):5117–5121. https://doi.org/10.1021/cg500740r

3. Teng R, Li Y, Cui B et al (2017) Experiment and numerical simulation of melt convection and oxygen distribution in 400-mm czochralski silicon crystal growth. Rare Met 36(2):134–141. https://doi.org/10.1007/s12598-016-0865-6

4. Vegad M, Bhatt NM (2014) Review of some aspects of single crystal growth using Czochralski Crystal growth technique. Procedia Technol 14:438–446. https://doi.org/10.1016/j.protcy.2014.08.056

5. Raufeisen A, Breuer M, Botsch T et al (2008) DNS of rotating buoyancy– and surface tension–driven flow. Int J Heat Mass Tran 51(25–26):6219–6234. https://doi.org/10.1016/j.ijheatmasstransfer.2008.01.041

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3. Influence of Thermal Conductivity and Emissivity of Heat Shield Surface Material on the Thermal Field of Czochralski Silicon Crystal Growth;Silicon;2024-06-08

4. Influence of thermal conductivity and emissivity of heat shield surface material on the thermal field of Czochralski silicon crystal growth;2024-02-22

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