Design, fabrication, and characterization of SU-8/carbon black nanocomposite based polymer MEMS acceleration sensor-Reference-Cited by-同舟云学术

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Design, fabrication, and characterization of SU-8/carbon black nanocomposite based polymer MEMS acceleration sensor

Published:2020-03-31 Issue:9 Volume:26 Page:2857-2867
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Ahmed Aftab,Khlifi Awatef,Pandit Shardul,Patkar Rajul,Joshi Anjali,Dixit Pradeep,Mezghani Brahim,Baghini Maryam Shojaei

Funder

Department of Science and Technology, Government of West Bengal

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-020-04824-7.pdf

Reference27 articles.

1. Ansari MZ, Bisen M, Cho C (2018) Modelling and analysis of diaphragm integrated SU8/CB nanocomposite piezoresistive polymer microcantilever biosensor. Microsyst Technol 24:3061–3068. https://doi.org/10.1007/s00542-018-3777-6

2. De Doncker HWJA, Guan T, Driesen M, Puers R (2009) Biaxial and uniaxial epoxy accelerometers. Procedia Chem 1:572–575. https://doi.org/10.1016/j.proche.2009.07.143

3. Gammelgaard L, Rasmussen PA, Calleja M et al (2006) Microfabricated photoplastic cantilever with integrated photoplastic/carbon based piezoresistive strain sensor. Appl Phys Lett 88:113508. https://doi.org/10.1063/1.2186396

4. Hadi Said M, Tounsi F, Mezghani B et al (2018) Induced stress enhancement using u-shaped arms in a 3-axis piezoresistive MEMS accelerometer. In: 2018 15th International multi-conference system signals devices, SSD 2018, pp 1481–1486. https://doi.org/10.1109/SSD.2018.8570360

5. Hari K, Verma SK, Praveen Krishna IR, Seena V (2018) Out-of-plane dual flexure MEMS piezoresistive accelerometer with low cross axis sensitivity. Microsyst Technol 24:2437–2444. https://doi.org/10.1007/s00542-017-3679-z

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