Improvement and optimization of high-precision accelerometer based on first-order diffraction using single-layer grating-Reference-Cited by-同舟云学术

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Improvement and optimization of high-precision accelerometer based on first-order diffraction using single-layer grating

Published:2022-11-21 Issue:1 Volume:30 Page:17-25
ISSN:1340-6000
Container-title:Optical Review
language:en
Short-container-title:Opt Rev

Author:

Wang Yu,Huang Kun,Cheng Lin

Funder

Shanxi Provincial Key Research and Development Project

Innovative Research Group Project of the National Natural Science Foundation of China

Publisher

Springer Science and Business Media LLC

Subject

Atomic and Molecular Physics, and Optics

Link

https://link.springer.com/content/pdf/10.1007/s10043-022-00777-6.pdf

Reference39 articles.

1. Kumar Jindal, S., et al.: “Design guidelines for MEMS optical accelerometer based on dependence of sensitivities on diaphragm dimensions.” J Circuit Syst Comput 29, 2050107 (2020)

2. Fleming, W.J.: Overview of automotive sensors. IEEE Sens. J. 1, 296–308 (2001)

3. Judy, J.W.: Microelectromechanical systems (MEMS): fabrication, design and applications. Smart Mater. Struct. 10, 1115–1134 (2001)

4. Shaeffer, D.K.: MEMS inertial sensors: a tutorial overview. Commun Mag IEEE. 51, 100–109 (2013)

5. Huang, K., et al.: High sensitivity sensing system theoretical research base on waveguide-nano DBRs one dimensional photonic crystal microstructure. Optics Commun. 470, 125392 (2020)

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