Affiliation:
1. Gunma University
2. The University of Tokyo
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Reference22 articles.
1. (1) R. Ito, et al.: “Near-zero Poisson's ratio and large-area metamaterial made of UV-PDMS using 3D backside exposure”, Technical digests of the 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS2023, pp. 1184-1187 (2023)
2. (2) J. Biggs, et al.: “A natively flexible 32-bit ARM microprocessor”, Nature, Vol. 595, pp. 532-536 (2021)
3. (3) J. J. Rocha-Cuervo, et al.: “Sputtering plasma effect on Zinc Oxide thin films produced on photopolymer substrate”, Polymers, Vol. 2283, pp. 1-14 (2023)
4. (4) A. Ahmed, et al.: “Design, fabrication, and characterization of SU-8/carbon black nanocomposite based polymer MEMS acceleration sensor”, Microsystems Technologies, Vol. 26, pp. 2857-2867 (2020)
5. (5) M. Jangra, et al.: “Maskless lithography: an approach to SU-8 based sensitive and high-g Z-axis polymer MEMS accelerometer”, Microsystems Technologies, Vol. 27, pp. 2925-2934 (2021)