Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference52 articles.
1. Ahmed A, Khlifi A, Pandit S, Patkar R, Joshi A, Dixit P, Mezghani B, Baghini MS (2020) Design, fabrication, and characterization of SU-8/carbon black nanocomposite based polymer MEMS acceleration sensor, Microsyst Technol.
2. Alvin Barlian A, Park W-T, Mallon Jr JR, Rastegar AJ, Pruitt BL (2009) Review: semiconductor piezoresistance for Microsystems. In: Proc. IEEE Vol. 97, pp. 513
3. Available online: http://www.microchem.com/Prod-SU8_KMPR.html
4. Aydemir A, Akin T (2020) Self-packaged three axis capacitive mems accelerometer. In: IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), Vancouver, BC, Canada, pp. 777–780.
5. Bao M-H (2000) Micro mechanical transducers: pressure sensors, accelerometers and gyroscopes. In: Middelhoek S (ed) Handbook of Sensors and Actuators, vol. 8, Elsevier, Oxford
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献