Author:
Engelke Rainer,Ahrens Gisela,Arndt-Staufenbiehl Norbert,Kopetz Stefan,Wiesauer Karin,Löchel Bernd,Schröder Henning,Kastner Johann,Neyer Andreas,Stifter David,Grützner Gabi
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. Jian L, Desta YM, Goettert J, Bednarzik M, Loechel B, Yoonyoung J, Aigeldinger G, Singh V, Ahrens G, Gruetzner G, Ruhmann R, Degen R (2003) SU-8 based deep X-ray lithography/LIGA. SPIE 4797:394
2. Kastner J, Schlotthauer E, Salaberger D, Simon M, Sauerwein C (2005) Mikro-Computertomographie für die Charakterisierung und Vermessung von Mikrobauteilen, Jahrestagung der DGZfP, 2–4 Mai, Rostock
3. Kouba J, Engelke R, Bednarzik M, Ahrens G, Scheunemann HU, Gruetzner G, Loechel B, Miller H, Haase D (2006) SU-8—promising resist for advanced LIGA applications for high aspect ratio micro parts (this issue)
4. Wiesauer K, Pircher M, Goetzinger E, Bauer S, Engelke R, Ahrens G, Gruetzner G, Hitzenberger C, Stifter D (2005) En-face scanning optical coherende tomography with ultra-high resolution for material investigation. Opt Express 13:1015–1024. http://www.opticsinfobase.org/abstract.cfm?URI=oe-13-3-1015
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