登录 注册 会员服务 联系我们

Development and characterization of ultra high aspect ratio microstructures made by ultra deep X-ray lithography

  • Published:2015-11 Issue: Volume:225 Page:170-177
  • ISSN:0924-0136
  • Container-title:Journal of Materials Processing Technology
  • language:en
  • Short-container-title:Journal of Materials Processing Technology

Author:

Nazmov Vladimir,Reznikova Elena,Mohr Juergen,Schulz Joachim,Voigt Anja

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Metals and Alloys,Computer Science Applications,Modelling and Simulation,Ceramics and Composites

Reference49 articles.

1. Large tuning ratio high aspect ratio variable capacitors using leveraged bending;Achenbach;Microsyst. Technol.,2014

2. Functionalized SU-8 patterned with X-ray lithography;Balslev;J. Vac. Sci. Technol. B,2005

3. Integrated photonics devices on SU8 organic materials;Bêche;Int. J. Phys. Sci,2010

4. Use of SU-8 photoresist for very high aspect ratio X-ray lithography;Bogdanov;Microelectron. Eng.,2000

5. Fabrication of micro-gas chromatograph columns for fast chromatography;Bhushan;Microsyst. Technol.,2007

Cited by 17 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The SKIF X–Techno Beamline Project;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2023-12

2. Application of LIGA Rasters for the Filtration of Scattered Radiation in Dental Radiography;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2023-12

3. The SKIF X-Techno Beamline Project;Поверхность. Рентгеновские, синхротронные и нейтронные исследования;2023-11-01

4. Optimization of x-ray lithography conditions for fabrication of large arrays of high-aspect-ratio submicron pores;Journal of Micromechanics and Microengineering;2021-04-13

5. Formation of a fine polymer structure on a plastic substrate through phase separation of a liquid crystal mixture;Journal of Information Display;2020-09-02
同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3