Formation of a fine polymer structure on a plastic substrate through phase separation of a liquid crystal mixture
Author:
Affiliation:
1. Department of Electronics Engineering, Pusan National University, Busan, Republic of Korea
Funder
National Research Foundation of Korea
Publisher
Informa UK Limited
Subject
Electrical and Electronic Engineering,General Materials Science
Link
https://www.tandfonline.com/doi/pdf/10.1080/15980316.2020.1810790
Reference35 articles.
1. J.H. Park , Y.K. Yoon , M. R. Prausnitz , and M. G. Allen , “High-aspect-ratio tapered structures using an integrated lens technique,” in 17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004 Technical Digest pp. 383-386.
2. Development and characterization of ultra high aspect ratio microstructures made by ultra deep X-ray lithography
3. Injection molding of polymer micro- and sub-micron structures with high-aspect ratios
4. Soft X-ray lithography of high aspect ratio SU8 submicron structures
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