SU-8: promising resist for advanced direct LIGA applications for high aspect ratio mechanical microparts-Reference-Cited by-同舟云学术

SU-8: promising resist for advanced direct LIGA applications for high aspect ratio mechanical microparts

Published:2006-07-07 Issue:3-4 Volume:13 Page:311-317
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Kouba J.,Engelke R.,Bednarzik M.,Ahrens G.,Scheunemann Heinz-Ulrich,Gruetzner G.,Loechel B.,Miller H.,Haase D.

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-006-0178-z.pdf

Reference7 articles.

1. Achenbach S (2000) Optimierung zur Herstellung von Mikrostrukturen durch Ultratiefe Röntgenlithographie (UDXRL). PhD Thesis, University Karlsruhe

2. Degen R, Slotter R (2004) Zero Backlash Micro-Gears and Actuators for Microassembly Applications, www.harmonicdrive.de/de/pdf/fachauf_18.pdf

3. Engelke R, Ahrens G, Ruhmann R, Kopetz S, Kastner J, Wiesauer K, Stifter D, Loechel B, Neyer A, Gruetzner G (2005) Possibilities of Inline Process Inspection of High Aspect ratio LIGA Microstructures, HARMST

4. Grützner G, Ruhmann R, Ahrens G, Bednarzik M, Loechel B, Limbecker P, Goettert J, Desta Y, Singh V (2003) Improved process parameters and impact on structure quality of high aspect ratio SU-8 microstructures, HARMST, Monterey

5. Mentz W, Mohr J (1997) Mikrosystemtechnik fuer ingenieure. VCH Verlaggesselschaft mbH, Weinheim

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