Review of polymer MEMS micromachining
Author:
Funder
National Science Foundation
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0960-1317/26/i=1/a=013001/pdf
Reference347 articles.
1. SOFT LITHOGRAPHY
2. Characterization of Polydimethylsiloxane (PDMS) Properties for Biomedical Micro/Nanosystems
3. Liquid crystal polymer (LCP) for MEMS: processes and applications
4. Cyclic olefin polymers: emerging materials for lab-on-a-chip applications
5. Hot embossing as a method for the fabrication of polymer high aspect ratio structures
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