Affiliation:
1. Karlsruhe Institute of Technology, Institute of Microstructure Technology, Eggenstein-Leopoldshafen
2. microworks GmbH, Karlsruhe
Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. Introduction: LIGA and its applications;Saile,2009
2. Deep x-ray lithography;Meyer,2015
3. Soft x-ray lithography for high-aspect ratio sub-micrometer structures;Goettert,2012
4. Process conditions in X-ray lithography for the fabrication of devices with sub-micron feature sizes
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