Author:
Guo Zhanshe,Fu Peng,Liu Defeng,Huang Manguo
Funder
the Aviation Research Foundation
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Chang H, Gong X, Wang S, Zhou P (2015) On improving the performance of a triaxis vortex convective gyroscope through suspended silicon thermistors. IEEE Sens J 15:946–955
2. Chiu SR, Teng LT, Chao JW, Sue CY, Lin CH, Chen HR et al (2014) An integrated thermal compensation system for MEMS inertial sensors. Sensors 14:4290–4311
3. Khazaai JJ, Haris M, Qu H et al (2010) Displacment amplification and latching mechanism using V-shape actuators in design of electro-thermal MEMS switches. Sensors IEEE, pp 1454–1459
4. Ng EJ, Ahn CH, Yang Y, Hong VA, Chiang CF, Ahadi E et al (2013) Localized, degenerately doped epitaxial silicon for temperature compensation of resonant MEMS systems. In: Transducers & eurosensors Xxvii: the international conference on solid-state sensors, actuators and microsystems, pp 2419–2422
5. Nguyen TC, Howe RT (1994) CMOS micromechanical resonator oscillator. In: Electron Devices Meeting, 1993. IEDM ‘93. Technical Digest, International, pp 199–202
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