An Integrated Thermal Compensation System for MEMS Inertial Sensors-Reference-Cited by-同舟云学术

An Integrated Thermal Compensation System for MEMS Inertial Sensors

Author:

Chiu Sheng-Ren,Teng Li-Tao,Chao Jen-Wei,Sue Chung-Yang,Lin Chih-Hsiou,Chen Hong-Ren,Su Yan-Kuin

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Link

Reference20 articles.

1. Micromachined inertial sensors for vehicles;Barbour;IEEE Confer. Intell. Trans. Syst.,1997

2. MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness;Acar,2008

4. Temperature dependent characteristics of the JPL silicon MEMS gyroscope;Shcheglov;IEEE Aerosp. Conf. Proc.,2000

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