Temperature Effect on the Optical Characteristics of a Microoptoelectromechanical Accelerometer-Reference-Cited by-同舟云学术

Temperature Effect on the Optical Characteristics of a Microoptoelectromechanical Accelerometer

Published:2024-06-28 Issue: Volume:555 Page:40-44
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Container-title:2024 IEEE 25th International Conference of Young Professionals in Electron Devices and Materials (EDM)
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Author:

Barbin Evgenij S.¹,Nesterenko Tamara G.²,Koleda Aleksej N.³,Talovskaia Alena A.³,Kulinich Ivan V.⁴,Mokhovikov Denis M.³

Affiliation:

1. The Tomsk State University of Control Systems and Radioelectronics. Laboratory of Radiophotonics, V.E. Zuev Institute of Atmospheric Optics of SB RAS,Laboratory of microsystems engineering,Tomsk,Russia

2. The Tomsk State University of Control Systems and Radioelectronics,Laboratory of microsystems engineering,Tomsk,Russia

3. The Tomsk State University of Control Systems and Radioelectronics,Laboratory of Radiophotonics,Tomsk,Russia

4. The Tomsk State University of Control Systems and Radioelectronics. Laboratory of Intelligent Computer Systems, V.E. Zuev Institute of Atmospheric Optics of SB RAS,Laboratory of Radiophotonics,Tomsk,Russia

Funder

Ministry of Science and Higher Education of the Russian Federation

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx8/10614947/10614948/10615062.pdf?arnumber=10615062

Reference21 articles.

1. The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

2. Temperature Effect on the Mechanical Transmission Coefficient of a Microoptoelectromechanical Accelerometer

3. Optical Interconnects: The Silicon Approach;Pavesi,2006

4. Optimization and comprehensive comparison of thermooptic phase shifter with folded waveguide on SiN and SOI platforms;al;Opt. Commun,2024

5. Optical Temperature Sensor Based on Polysilicon Waveguides

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1. Temperature Effect on the Mechanical Transmission Coefficient of a Microoptoelectromechanical Accelerometer;2024 IEEE 25th International Conference of Young Professionals in Electron Devices and Materials (EDM);2024-06-28