Author:
Engesser Manuel,Franke Axel R.,Maute Matthias,Meisel Daniel C.,Korvink Jan G.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference36 articles.
1. Amarasinghe R, Dao DV, Toriyama T, Sugiyama S (2007) Development of miniaturized 6-axis accelerometer utilizing piezoresistive sensing elements. J Sens Actuators A Phys 134:310–320
2. Bao MH (2000) Handbook of sensors and actuators, volume 8: micro mechanical transducers. Elsevier, Amsterdam. ISBN 0-444-50558-X
3. Boroch R, Wiaranowski J, Mueller-Fiedler R, Ebert M, Bagdahn J (2006) Characterization of strength properties of thin polycrystalline silicon films for MEMS applications. Fatigue Fracture Eng Mater Struct 30:2–12
4. Bosch Sensortec GmbH (2008) Data sheet BMA150 Digital, triaxial acceleration sensor. http://www.bosch-sensortec.com
5. Chen H, Bao M, Zhu H, Shen S (1997) A piezoresistive accelerometer with a novel vertical beam structure. J Sens Actuators Phys A 63:19–25
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