A piezoresistive accelerometer with a novel vertical beam structure-Reference-Cited by-同舟云学术

A piezoresistive accelerometer with a novel vertical beam structure

Published:1997-09 Issue:1 Volume:63 Page:19-25
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Chen Hong,Bao Minhang,Zhu Haijun,Shen Shaoqun

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. A batch-fabricated silicon accelerometer;Roylance;IEEE Trans Electron Devices, ED-26,1979

2. Accelerometer systems with self-testable features;Allen;Sensors and Actuators,1989

3. A micromechanical structure eliminating lateral effect of silicon accelerometer;Bao,1991

4. A novel 3-axis monolithic silicon accelerometer;Andersson,1995

5. Over-load protection of micromechanical Si accelerometers;Chen,1995

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