Depth scale calibration during sputter removal of multilayer systems by SNMS
Author:
Publisher
Springer Science and Business Media LLC
Subject
Clinical Biochemistry,General Materials Science,General Medicine,Analytical Chemistry
Link
http://link.springer.com/content/pdf/10.1007/BF00572355.pdf
Reference5 articles.
1. Kempf JE, Wagner HH (1984) In: Oechsner H (ed) Thin film and depth profile analysis. Springer, Berlin Heidelberg New York Toyko, p 87
2. Kirschner J, Etzkorn H -W (1984) In: Oechsner H (ed) Thin film and depth profile analysis. Springer, Berlin Heidelberg New York Tokyo, p 103
3. Thomas JH, Sharma SP (1977) J Vac Sci Technol 14:1168
4. Oechsner H, Stumpe E (1977) Appl Phys 14:43
5. Laegreid N, Wehner GK (1961) Appl Phys 32:365
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