Sputtered neutral mass spectrometry (SNMS) as a tool for chemical surface analysis and depth profiling-Reference-Cited by-同舟云学术

Sputtered neutral mass spectrometry (SNMS) as a tool for chemical surface analysis and depth profiling

Published:1977-09 Issue:1 Volume:14 Page:43-47
ISSN:0340-3793
Container-title:Applied Physics
language:en
Short-container-title:Appl. Phys.

Author:

Oechsner H.,Stumpe E.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering,General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://link.springer.com/content/pdf/10.1007/BF00882632.pdf

Reference10 articles.

1. A. Benninghoven: Surface Sci.35, 427 (1973); and53, 596 (1975)

2. H.W. Werner: Vacuum24, 493 (1974)

3. J.M.Schroeer: Secondary Ion Mass Spectrometry, eds. by K.F.J.Heinrich and D.E.Newbury, NBS Special Publ. No. 427, Washington D.C., 1975 p. 121 and paper presented at the FACCS-Meeting. Nov. 15.–19., 1976, Philadelphia, PA

4. R.E. Honig: Adv. Mass Spectrometry2, 25 (1962)

5. H. Oechsner: Plasma Phys.16, 835 (1974)

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