High-aspect ratio micro- and nanostructures enabled by photo-electrochemical etching for sensing and energy harvesting applications

Author:

Alhalaili BadriyahORCID,Dryden Daniel M.,Vidu Ruxandra,Ghandiparsi Soroush,Cansizoglu Hilal,Gao Yang,Saif Islam M.

Funder

Kuwait Institute for Scientific Research

National Science Foundation

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Cell Biology,Physical and Theoretical Chemistry,Materials Science (miscellaneous),Atomic and Molecular Physics, and Optics,Biotechnology

Reference32 articles.

1. Abass OA, Ali SM (2007) Morphological aspects of porous silicon prepared by photo-electrochemical etching. Al-Mustansiriya J Sci 18:58–66

2. Abbas OA, Omran AH, Rahim AH (2008) The effect of different wavelengths on porous silicon formation process. Univ Babylon J 1(1):75

3. Bassu M, Surdo S, Strambini LM, Barillaro G (2012) Electrochemical micromachining as an enabling technology for advanced silicon microstructuring. Adv Func Mater 22(6):1222–1228

4. Bellinger SL, Fronk RG, McNeil WJ, Sobering TJ, McGregor DS (2012) Improved high efficiency stacked microstructured neutron detectors backfilled with nanoparticle (LiF)–Li-6. IEEE Trans Nuclear Sci 59(1):167–173

5. Chiamori HC, Hou M, Chapin CA, Shankar A, Senesky DG (2014) Characterization of gallium nitride microsystems within radiation and high-temperature environments. Reliab Packag Test Charact MOEMS/MEMS Nanodev Nanomater XIII:8975

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