Electrochemical Micromachining as an Enabling Technology for Advanced Silicon Microstructuring-Reference-Cited by-同舟云学术

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Electrochemical Micromachining as an Enabling Technology for Advanced Silicon Microstructuring

Published:2012-01-30 Issue:6 Volume:22 Page:1222-1228
ISSN:1616-301X
Container-title:Advanced Functional Materials
language:en
Short-container-title:Adv. Funct. Mater.

Author:

Bassu Margherita,Surdo Salvatore,Strambini Lucanos Marsilio,Barillaro Giuseppe

Publisher

Wiley

Subject

Electrochemistry,Condensed Matter Physics,Biomaterials,Electronic, Optical and Magnetic Materials

Reference22 articles.

1. Three-dimensional nanopillar-array photovoltaics on low-cost and flexible substrates

2. The origins and the future of microfluidics

3. 3D chip-stacking technology with through-silicon vias and low-volume lead-free interconnections

4. High aspect ratio silicon etch: A review

5. High-aspect-ratio bulk micromachining of titanium

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