Author:
Gu Bin,Liu Hongyuan,Mai Yiu-Wing,Feng Xi Qiao,Yu Shou Wen
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Computational Mechanics
Reference25 articles.
1. Bruel M.: Silicon-on-insulator material technology. Electron. Lett. 31, 1201–1202 (1995)
2. Bruel M.: Application of hydrogen ion beans to silicon on insulator material technology. Nucl. Instrum. Methods B 108, 313–319 (1996)
3. Kozlovskii V.V., Kozlov V.A., Lomasov V.N.: Modification of semiconductors with proton beams. Semiconder 34, 129–147 (2000)
4. Aspar B., Bruel M., Moriceau H., Maleville C., Pouneyrol T., Papon A.M.: Basic mechanism involved in the smart-cut process. Microelectron. Eng. 36, 233–240 (1997)
5. Aspar B., Moriceau H., Jalaguier E., Lagahe C.: The generic nature of the smart-cut process for thin film transfer. J. Electron. Mater. 30, 834–840 (2001)
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