FinFET-Based Inverter Design and Optimization at 7 Nm Technology Node

Author:

Jena J.,Jena D.,Mohapatra E.,Das S.,Dash T. P.

Publisher

Springer Science and Business Media LLC

Subject

Electronic, Optical and Magnetic Materials

Reference48 articles.

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4. Pidin S, Mori T, Inoue K, Fukuta S, Itoh N, Mutoh E, Ohkoshi K, Nakamura R, Kobayashi K, Kawamura K, Saiki T, Fukuyama S, Satoh S, Kase M, Hashimoto K (2004) A novel strain enhanced CMOS architecture using selectively deposited high tensile and high compressive silicon nitride films. In IEEE Electron Devices Meeting IEDM-2004:213–216

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