Author:
Tsuchiya T.,Yamaji Y.,Sugano K.,Tabata O.
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Aerospace Engineering
Reference18 articles.
1. Mutoh M, Iyoda M, Fujita et al (1990) Development of integrated semiconductor-type acceleration. Proc. of IEEE Workshop on Electronic Applications in Transportation: 35-38
2. Brown JA, Connally SB (1992) Slow Crack Growth in Single-Crystal Silicon. Science 256:1537–9
3. Tsuchiya T, Inoue A, Sakata J, Hashimoto M, Yokoyama A, Sugimoto M (1998) Fatigue Test of Single Crystal Silicon Resonator. Tech. Dig. 16th Sensor Symp. (Kawasaki): 277–80
4. Liu H-K, Lee BJ, Liu P-P (2007) Low cycle fatigue of single crystal silicon thin films. Sensors Actuators A 140:257–65
5. Tsuchiya T, Tabata O, Sakata J, Taga Y (1998) Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films: J Microelectromech Syst 7:106–13
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