A Comparison of Fatigue Tensile Polysilicon Thin Films at Micro-scale Using Single and Parallel Setups
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Publisher
Springer Nature Switzerland
Link
https://link.springer.com/content/pdf/10.1007/978-3-031-62238-0_2
Reference14 articles.
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2. Muhlstein, C.L., Brown, S.B., Ritchie, R.O.: High-cycle Fatigue of single-crystal silicon thin films. J. Microelectoromech. Syst. 10, 593–600 (2001)
3. Alsem, D.H., Pierron, O.N., Stach, E.A., Muhlstein, C.L., Ritchie, R.O.: Mechanisms for fatigue of micron-scale silicon structural films. Adv. Eng. Mater. 9, 15–30 (2007)
4. Sharpe, W.N., Bagdahn, J.: Fatigue testing of polysilicon - a review. Mech. Mater. 36, 3–11 (2004)
5. Langfelder, G., Longoni, A., Zaraga, F., Corigliano, A., Ghisi, A., Merassi, A.: A new on-chip test structure for real time fatigue analysis in polysilicon MEMS. Microelectron. Reliab. 49, 120–126 (2009)
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