Effect of fabrication process on fracture strength and fatigue life of micromirrors made from single-crystal silicon-Reference-Cited by-同舟云学术

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Effect of fabrication process on fracture strength and fatigue life of micromirrors made from single-crystal silicon

Published:2022-09 Issue: Volume:162 Page:106983
ISSN:0142-1123
Container-title:International Journal of Fatigue
language:en
Short-container-title:International Journal of Fatigue

Author:

Xia Yuanlin,Suzuki Makoto,Xue Peidong,Hirai Yoshikazu,Tsuchiya Toshiyuki

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,Modeling and Simulation

Reference27 articles.

1. Piezoelectric micro actuator devices;Maeda;J Electroceram,2004

2. SCREAM Ⅰ: a single mask, single-crystal silicon, reactive ion etching process for microelectromechanical structures;Shaw;Sensor Actuat A,1994

3. Comb-Actuated Resonant Torsional Microscanner With Mechanical Amplification;Arslan;J Microelectromech Syst,2010

4. MEMS Laser Scanners: A Review;Holmstrom;J Microelectromech Syst,2014

5. Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM;Namazu;J Microelectromech Syst,2000

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fatigue lifetime evaluation of polysilicon thin films by using cyclic loading with gradually increasing amplitude;Microsystem Technologies;2024-02-21

2. Investigation of fracture toughness and microstructure of micro-scaled multilayer-DLC/silicon system via pillar splitting method;Ceramics International;2023-12

3. Alternating a-C:H coating effect on torsional strength of silicon beam for micromirrors;Sensors and Actuators A: Physical;2023-12

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