Comb-Actuated Resonant Torsional Microscanner With Mechanical Amplification-Reference-Cited by-同舟云学术

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Comb-Actuated Resonant Torsional Microscanner With Mechanical Amplification

Published:2010-08 Issue:4 Volume:19 Page:936-943
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Arslan Aslihan,Brown Dean,Davis Wyatt O.,Holmstrom Sven,Gokce Sertan Kutal,Urey Hakan

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/5532211/05482108.pdf?arnumber=5482108

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