Fabrication and applications of the optical diamond-like carbon films: a review
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
https://link.springer.com/content/pdf/10.1007/s10853-021-06818-w.pdf
Reference171 articles.
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3. Moghadam RZ, Dizaji HR, Ehsani MH (2019) Modification of optical and mechanical properties of nitrogen doped diamond-like carbon layers. Jour Mater Sci Mater Electr 30:19770–19781. https://doi.org/10.1007/S10854-019-02343-4
4. Neuville S (2019) Selective carbon material engineering for improved MEMS and NEMS. Micromachines 10:539. https://doi.org/10.3390/mi10080539
5. Lubwama M, Corcoran B, Sayers K (2015) DLC films deposited on rubber substrates: a review. Surf Eng 31:1–10. https://doi.org/10.1179/1743294414Y.0000000379
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