Bias voltage-induced structural change in PECVD-deposited diamond-like carbon coatings for optimizing the tribological performance

Author:

Zheng Jinhua,Mei Shiyang,Chao Yunfeng,Liu Qingyun,Wu Jinxing

Publisher

Elsevier BV

Reference40 articles.

1. DLC-based coatings obtained by low-frequency plasma-enhanced chemical vapor deposition (LFPECVD) in cyclohexane, principle and examples;Sanchette;Coatings,2021

2. Fabrication and applications of the optical diamond-like carbon films: a review;Lu;J. Mater. Sci.,2022

3. Diamond-like carbon coatings in the biomedical field: properties;Peng;applications and future development, Coatings,2022

4. Diamond-like amorphous carbon;Robertson;Mater. Sci. Eng. R-Rep.,2002

5. Effect of substrate bias on the properties of DLC films created using a combined vacuum arc;Zavaleyev;Bull. Mater. Sci.,2021

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