Author:
Farley C. W.,Kim T. S.,Streetman B. G.
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
25 articles.
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3. Mechanism for enhancement of electrical activation of silicon in GaAs by aluminum co‐implantation;Applied Physics Letters;1993-12-06
4. Properties of Mn+-implanted GaAs;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-06
5. Formation and characterization of shallow junctions by through-film ion implantation in GaAs;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-06