Defect-free surface of quartz glass polished in elastic mode by chemical impact reaction
Author:
Publisher
Springer Science and Business Media LLC
Subject
Metals and Alloys,General Engineering
Link
http://link.springer.com/content/pdf/10.1007/s11771-014-2446-x.pdf
Reference21 articles.
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3. EXARHOS G J, GUENTHER A H, KAISER N. The impact of laser damage on the lifetime of optical components in fusion laser [J]. Proc SPIE, 2004, 5273: 312–324.
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5. EDA H, ZHOU L, NAKANO H, KONDO R, SHIMIZU J. Development of single step grinding system for large scale Φ300 Si wafer [J]. CIRP Annals, 2001, 50: 225–228.
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