Author:
Veen G. N. A.,Baller T. S.,Dieleman J.
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry,Physics and Astronomy (miscellaneous),General Engineering,General Materials Science
Reference28 articles.
1. N.G. Einspruch, D.M. Brown (eds.):Plasma Processing for VLSI, VLSI Electronics Microstructure Science, Vol. 8 (Academic, New York 1984)
2. W. Sesselmann, T.J. Chuang: J. Vac. Sci. Technol. B3, 1507 (1985)
3. G.L. Loper, M.D. Tabat: Appl. Phys. Lett.46, 654 (1985)
4. T.J. Chuang: J. Vac. Sci. Technol.18, 638 (1981)
5. T.J. Chuang: IBM J. Res. Develop.26, 145 (1982)
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