Infrared laser induced reactions at metal and semiconductor surfaces-Reference-Cited by-同舟云学术

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Infrared laser induced reactions at metal and semiconductor surfaces

Published:1981-03 Issue:2 Volume:18 Page:638-642
ISSN:0022-5355
Container-title:Journal of Vacuum Science and Technology
language:en
Short-container-title:Journal of Vacuum Science and Technology

Author:

Chuang T. J.

Publisher

American Vacuum Society

Subject

General Engineering

Link

http://avs.scitation.org/doi/pdf/10.1116/1.570841

Cited by 32 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Synchrotron radiation-stimulated photochemical reaction and its application to semiconductor processes;Applied Organometallic Chemistry;1991-07

2. Laser-Driven Etching;Thin Film Processes;1991

3. SUPERSONIC MOLECULAR BEAM STUDIES ON THE DYNAMICS OF LASER-INDUCED Cl₂-Ta SURFACE-REACTIONS;Acta Physico-Chimica Sinica;1990

4. References;Thin Films by Chemical Vapour Deposition;1990

5. A time-of-flight study on the nanosecond laser induced etching of Cu with Cl2 at 308 nm;Applied Physics A Solids and Surfaces;1988-10

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