Etching of Metals and Insulators

Author:

Bäuerle Dieter

Publisher

Springer Berlin Heidelberg

Reference41 articles.

1. Armstrong D.A., J.L. Holmes: Decomposition of halides and derivatives, in Decomposition of Inorganic and Organometallic Compounds, ed. by C.H. Bamford, C.F.H. Tipper, Chem. Kinetics, Vol. 4 (Elsevier, Amsterdam 1972) p. 143

2. Bagratashvili V.N., V.N. Doljikov, V.S. Letokhov, E.A. Ryabov: Isotopically-selective dissociation of the CF3I molecules at high pressure under the action of the pulse radiation of CO2 laser, Zh. Tekh. Phys. Letters (Pis’ma Red.) 4, 1181 (1978)

3. Bagratashvili V.N., I.N. Knyazev, V.S. Letokhov, V.V. Lobko: Optoacoustic detection of multiple photon molecular absorption in a strong IR field, Opt. Commun. 18, 525 (1976)

4. Ben-Shaul A., Y. Haas, K.L. Kompa, R.D. Levine: Lasers and Chemical Change, Springer Ser. Chem. Phys., Vol. 10 (Springer, Berlin, Heidelberg 1981)

5. Brannon J.H., K.W. Brannon: UV photoetching of copper, J. Vac. Sci. Technol. B 7, 1275 (1989)

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