Indirect Nanofabrication
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Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-319-39361-2_9
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4. Sakamoto, J., et al. 2011. High aspect ratio nano mold fabrication by advanced edge lithography without CVD. Microelectronic Engineering 88: 1992–1996.
5. Hsu, D.S.Y. 1991. 50 nm linewidth ~platinum sidewall Aithography by effusive-source metal precuisor chemical deposition and ion-assisted etching. Applied Physics Letters 59(17): 2192.
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