Forbidden pitches in sub-wavelength lithography and their implications on design-Reference-Cited by-同舟云学术

Forbidden pitches in sub-wavelength lithography and their implications on design

Published:2007-02-14 Issue:1 Volume:14 Page:79-89
ISSN:0928-1045
Container-title:Journal of Computer-Aided Materials Design
language:en
Short-container-title:J Computer-Aided Mater Des

Author:

Kundu Sandip,Sreedhar Aswin,Sanyal Alodeep

Publisher

Springer Science and Business Media LLC

Subject

Computational Theory and Mathematics,Computer Science Applications,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/s10820-006-9044-7.pdf

Reference15 articles.

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4. Schellenberg, F.: A Little light magic, IEEE Spect. 40 34–39

5. Lord Rayleigh (1872) On the diffraction of object glasses. Mon. Not. R. Astron. Soc. 33, 59–63

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