Influence of nitrogen flow ratio on properties of c-axis oriented AlN films grown by RF magnetron sputtering-Reference-Cited by-同舟云学术

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Influence of nitrogen flow ratio on properties of c-axis oriented AlN films grown by RF magnetron sputtering

Published:2021-10-06 Issue:11 Volume:127 Page:
ISSN:0947-8396
Container-title:Applied Physics A
language:en
Short-container-title:Appl. Phys. A

Author:

Chen Guifeng,Li Haoran,Xie Xinjian,Xie Luxiao,Wang Endong,Liu Guodong,Zhang Hui,Lu Bowen,Li Changxing,Pei Haobo

Funder

the S&T Program of Hebei

the Research Foundation of Education Bureau of Hebei

National Natural Science Foundation of China

the project for Science and Technology Correspondent of Tianjin City

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Link

https://link.springer.com/content/pdf/10.1007/s00339-021-04972-1.pdf

Reference32 articles.

1. A.A.I. Abd-Elmageed, A.F. Al-Hossainy, E.M. Fawzy, N. Almutlaq, M.R. Eid, A. Bourezgui, S.M.S. Abdel-Hamid, N.B. Elsharkawy, M. Zwawi, M.H. Abdel-Aziz, M. Bassyouni, A.B. Slimane, M.S. Zoromba, Synthesis, characterization and DFT molecular modeling of doped poly (para-nitroaniline-co-para-toluidine) thin film for optoelectronic devices applications. Opt. Mater. 99, 109593 (2020)

2. M.S. Zoromba, M. Bassyouni, M.H. Abdel-Aziz, A.F. Al-Hossainy, N. Salah, A.A. Al-Ghamdi, M.R. Eid, Structure and photoluminescence characteristics of mixed nickel–chromium oxides nanostructures. Appl. Phys. A. 125, 642 (2019)

3. I. Kacem1, M. Daoud, W. Drid, H. Sellemi, K. Harzli, G.D. Izzara, B. Geslot, H. Guermazi, P. Blaise, F. Hosni, A.F. Al-Hossainy, A. Bourezgui, R. Chtourou (2019), Effects of neutron–gamma radiation on the free radical contents in epoxy resin: upconversion luminescence and structural stabilization. Appl. Phys. A. 125, 758

4. G. Chen, Y. Zhang, H. Zhang, L. Xie, Z. Xing, Z. Cheng, H. Li, Y. Xiao, H. Liang, H. Liu, X. Xie, L. Bian, G. Liu, Ultraviolet optical properties analysis of wurtzite AlN films grown by vapor phase epitaxy. Opt. Mater. 111, 110678 (2021)

5. A. Farouk, A. Hossainy, Synthesis, spectral, thermal, optical dispersion and dielectric properties of nanocrystalline dimer complex (PEPyr–diCd) thin films as novel organic semiconductor. Bull. Mater. Sci. 39, 209–222 (2016)

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1. Surface and bulk acoustic wave resonators based on aluminum nitride for bandpass filters;AAPPS Bulletin;2024-04-08

2. Effect of nitrogen flow ratio on the structure and optical properties of AlN film;Vacuum;2024-02

3. Three-step growth of AlN films on sapphire substrates by metal nitride vapor phase epitaxy;Journal of Crystal Growth;2024-01

4. High-pure AlN crystalline thin films deposited on GaN at low temperature by plasma-enhanced ALD;Vacuum;2023-07

5. The relationship between annealing and nitrogen flow ratios during magnetron sputtering of AlN films;Applied Physics A;2023-01-16

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