Author:
Plawsky Joel. L.,Gill William N.,Achanta Ravi S.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference25 articles.
1. R.S. Achanta, W.N. Gill, J.L. Plawsky, G. Haase, J. Vac. Sci. Technol. 24(3), 1417 (2006)
2. Y. Li, I. Ciofi, L. Carbonell, N. Heylen, J. Van Aelst, M.R. Baklanov, G. Groeseneken, K. Maex, Z. Tőkei, J. Appl. Phys. 104, 034113 (2008)
3. D. Oshida, T. Takewaki, M. Iguchi, T. Taiji, T. Morita, Y. Tsuchiya, S. Yokogawa, H. Kunishima, H. Aizawa, N. Okada, in Proceedings of the IEEE International Interconnect Technical Conference. (2008), p. 222
4. R.S. Achanta, W.N. Gill, J.L. Plawsky, Appl. Phys. Lett. 91, 234106 (2007)
5. R.S. Achanta, W.N. Gill, J.L. Plawsky, J. Appl. Phys. 106, 074906 (2009)
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