Ultraprecision grinding of microdimple array mold made of cemented carbide using nano-polycrystalline diamond tool
Author:
Affiliation:
1. Department of Intelligent and Mechanical Engineering, Fukuoka Institute of Technology
2. Advanced Materials R&D Laboratories, Sumitomo Electric Industries, Ltd.
Publisher
Japan Society of Mechanical Engineers
Subject
General Medicine
Link
https://www.jstage.jst.go.jp/article/transjsme/88/912/88_22-00159/_pdf
Reference13 articles.
1. Amamoto Y., Kawakami T., Itoh Y. Semba T., Fabrication of microgrinding tool for ultraprecision machining using pulsed fiber laser, Proceedings of the 2009 Annual Meeting of the Japan Society for Abrasive Technology, B12(2009), pp. 137-138(in Japanese).
2. Gohya N., Sun W., Harada T., Semba T., Truing technique for flattening and smoothing fine diamond grains on wheel working surface of electroformed diamond tool, Transactions of the JSME (in Japanese), Series C, Vol. 76, No. 771(2010), pp. 3126-3133.
3. Kanomata G., Mastumoto T., 3-D Micro manufacturing of photo sensitive glass using gray-scale mask, T. IEE Japan, Vol. 122, No. 11(2002), pp. 531-536 (in Japanese).
4. Kobayashi N., Sasaki R., Horinouchi T., Fabrication of micro-lens arrays utilizing lithographically replicated concave resist patterns and evaluation of lens characteristics, Journal of the Japan Society for Precision Engineering, Vol. 83, No. 8(2017), pp. 789-795(in Japanese).
5. Saito, T., Nanoimprint lithography is profound, Journal of the Japan Society for Precision Engineering, Vol. 75, No. 8(2009), pp. 958-961 (in Japanese).
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