Fabrication of Au Microstructure Using ICP-RIE-Reference-Cited by-同舟云学术

Fabrication of Au Microstructure Using ICP-RIE

Published:2011 Issue:775 Volume:77 Page:691-697
ISSN:0387-5024
Container-title:TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
language:en
Short-container-title:Trans.JSME(C)

Author:

NODA Daiji¹,TOKUOKA Atsushi,HATTORI Tadashi

Affiliation:

1. University of Hyogo Laboratory of Advanced Science and Technology for Industry

Publisher

Japan Society of Mechanical Engineers

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials

Link

http://www.jstage.jst.go.jp/article/kikaic/77/775/77_775_691/_pdf

Reference11 articles.

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2. (2) Hirata, Y., “LIGA process - micromachining technique using synchrotron radiation lithography - and some industrial applications”, Nuclear Instruments and Methods in Physics Research Section B, Vol. 208 (2003), pp. 21-26.

3. Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: a review

4. (4) Bischofberger, R., Zimmermann, H. and Staufert, G., “Low-cost MARMS process”, Sensors and Actuators A, Vol. 61, No. 1-3 (1997), pp. 392-399.

5. (5) Malek, C.K., “SU8 resist for low-cost X-ray patterning of high-resolution, high-aspect-ratio MEMS”, Microelectronics Journal, Vol. 33, No. 1-2 (2002), pp. 101-105.

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