Wide Bandwidth by Using Multi-VCM for Isolation Device(Mechanical Systems)-Reference-Cited by-同舟云学术

Wide Bandwidth by Using Multi-VCM for Isolation Device(Mechanical Systems)

Published:2010 Issue:763 Volume:76 Page:550-556
ISSN:0387-5024
Container-title:Transactions of the Japan Society of Mechanical Engineers Series C
language:en
Short-container-title:Trans.JSME(C)

Author:

TAKAHASHI Masato¹,WAKUI Shinji,MAKINOUCHI Susumu¹

Affiliation:

1. Nikon Corporation Precision Equipment Company Development Headquarters

Publisher

Japan Society of Mechanical Engineers

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials

Link

https://www.jstage.jst.go.jp/article/kikaic1979/76/763/76_KJ00006167994/_pdf

Reference7 articles.

1. 1) WAKUI S. The function of isolation device in precision positioning. Precision Engineering. (2007) vol.73, no.4, p.405.

2. 2) TAKAHASHI M. Technical Seminar High accurate positioning technology and its application Thorough Explanation. Electronic Journal. (2008) vol.249th, p.101.

3. 3) Canon Corporation. Controller of vertical direction of isolation device with air spring. Patent3046696. (2004)

4. 4) Nikon Corporation. Isolation Device, Isolation Method and Exposure Lithograph Machine. Patent3807516. (2006)

5. 5) Nikon Corporation. Isolation device, Exposure Lithograph Machine and Isolation Method. Patent Application2006-510733. (2006)

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