A Scalable Multi-Functional Thermal Test Chip Family: Design and Evaluation

Author:

Benedek Zs.1,Courtois B.2,Farkas G.3,Kolla´r E.4,Mir S.5,Poppe A.3,Rencz M.3,Sze´kely V.4,Torki K.6

Affiliation:

1. Department of Electron Devices, Budapest University of Technology and Economics (formerly TUB), Budapest XI, Goldmann Gy. Te´r 3, H-1111 Hungary

2. TIMA Laboratory, 46 Avenue Fe´lix Viallet, 38031, Grenoble, Cedex France

3. MicReD Ltd., Budapest XI, Gulya´s u.27, H-1112 Hungary

4. Department of Electron Devices, Budapest University of Technology and Economics, Budapest, Hungary

5. TIMA Laboratory, 46 Avenue Fe´lix Viallet, 38031, Grenoble, Cedex, France

6. TIMA Laboratory, 46 Avenue Fe´lix Viallet, 38031 Grenoble, Cedex, France

Abstract

Nowadays, thermal characterization of IC packages and packaging technologies is becoming a key task in thermal engineering. To support this by measurements, we developed a family of thermal test chips that allow a wide range of possible applications. Our chips are based on the same basic cell that is mainly covered by dissipating resistors and also contains a temperature sensor. These basic cells are organized into arrays of different size. The arrays are designed such that further “super arrays” can also be built for tiling up larger package cavities. The first members of the family, TMC9 and TMC81, have been manufactured. Our measurements show that the goals aimed at the design have been achieved.

Publisher

ASME International

Subject

Electrical and Electronic Engineering,Computer Science Applications,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference14 articles.

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3. Manual for using Delco Electronics thermally sensitive chip, D.L. Rodkey Delco Electronics 1/30/87.

4. Jablonski, G., et al., 1997, “Thermal Benchmark Integrated Circuit in BiCMOS Technology,” Informal Proceedings, 3rd THERMINIC Workshop, 21–23 Sept., Cannes, France, pp. 34–36.

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