A Submicron Multiaxis Positioning Stage for Micro- and Nanoscale Manufacturing Processes
Author:
Affiliation:
1. Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801
2. Mem.ASME
3. Department of Mechanical Engineering, University of Victoria, Victoria, BC, V8W 3P6, Canada
4. Fellow ASME
Abstract
Publisher
ASME International
Subject
Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering
Link
http://asmedigitalcollection.asme.org/manufacturingscience/article-pdf/doi/10.1115/1.2917315/5816520/031112_1.pdf
Reference21 articles.
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2. An Ultra Precision XYθz Piezo-Micropositioner; Part I: Design and Analysis;Chang;IEEE Trans. Ultrason. Ferroelectr. Freq. Control
3. An Ultra Precision XYθz Piezo-Micropositioner; Part II: Experiment and Performance;Chang;IEEE Trans. Ultrason. Ferroelectr. Freq. Control
4. Design of a Low-Cost Nano-Manipulator Which Utilizes a Monolithic, Spatial Compliant Mechanism;Culpepper;Precis. Eng.
5. Physik Instrumente, www.physikinstrumente.com.
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