Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism

Author:

Culpepper Martin L.,Anderson Gordon

Publisher

Elsevier BV

Subject

General Engineering

Reference20 articles.

1. Xu Y, Atherton PD, Hicks TR, McConnel M, Rhead R. Design and characterization of an ultra-precision x–y stage. Proceedings of the First International Euspen Conference 1999, vol. 2; 121–4.

2. Design of orientation stages for step and flash imprint lithography;Choi;Precision Eng.,2001

3. A Profilometer for surface proximity probe applications;Smith;Nanotechnology,1992

4. Optimal design of a flexure hinge-based XY wafer stage;Ryu;Precision Eng.,1997

5. Hale LC. Principles and techniques for designing precision machines. Ph.D. Thesis, MIT, Cambridge, MA; 1999. p. 183–4.

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