Design and control of a cascaded piezoelectric actuated two-degrees-of-freedom positioning compliant stage
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference33 articles.
1. A submicron multiaxis positioning stage for micro and nanoscale manufacturing processes;Balasubramanian;ASME J Manuf Sci Eng,2008
2. The design and characterization of a piezo-driven ultra-precision stepping positioner;Gao;Meas Sci Technol,2000
3. Active vibration control using a novel three-dof precision micro-stage;Kim;Smart Mater Struct,2010
4. Automatic defect inspection of patterned thin film transistor–liquid crystal display (TFT–LCD) panels using one-dimensional fourier reconstruction and wavelet decomposition;Tsai;Int J Prod Res,2005
5. Precision control of a T-type gantry using sensor/actuator averaging and active vibration damping;Gordon;Precision Eng,2012
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