Nonlinear Dynamic Behavior Analysis of Microelectrostatic Actuator Based on a Continuous Model Under Electrostatic Loading
Author:
Affiliation:
1. Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan 70101, R.O.C.
2. Department of Mechanical Engineering, National Chin-Yi University of Technology, Taichung County, Taiwan 411, R.O.C.
Abstract
Publisher
ASME International
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics
Link
http://asmedigitalcollection.asme.org/appliedmechanics/article-pdf/doi/10.1115/1.4002003/5761904/031003_1.pdf
Reference26 articles.
1. Accelerated Life Testing for Micro-Machined Chemical Sensors;Bose;IEEE Trans. Reliab.
2. Effect of Temperature on Capacitive RF MEMS Switch Performance—A Coupled-Field Analysis;Zhu;J. Micromech. Microeng.
3. High-Voltage Devices and Circuits Fabricated Using Foundry CMOS for Use With Electrostatic MEM Actuators;Maluf;Sens. Actuators, A
4. Simulated and Experimental Dynamic Response Characterization of an Electromagnetic Microvalve;Luharuka;Sens. Actuators, A
5. Application of Piezoelectric Layers in Electrostatic MEM Actuators: Controlling of Pull-In Voltage;Rezazadeh;Microsyst. Technol.
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