Effect of temperature on capacitive RF MEMS switch performance—a coupled-field analysis
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference26 articles.
1. RF MEMS from a device perspective
2. Micromachined low-loss microwave switches
3. Micromechanical switches fabricated using nickel surface micromachining
4. A DC-contact MEMS shunt switch
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