High-voltage devices and circuits fabricated using foundry CMOS for use with electrostatic MEM actuators-Reference-Cited by-同舟云学术

High-voltage devices and circuits fabricated using foundry CMOS for use with electrostatic MEM actuators

Published:1996-03 Issue:1-3 Volume:52 Page:187-192
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Maluf N.I.,Reay R.J.,Kovacs G.T.A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. IC-processed electrostatic synchronous micromotors;Tai;Sensors and Actuators,1989

2. Operation of harmonic side-drive micromotors studied through gear ratio measurement;Mehregany,1991

3. Linear motion microactuators using piezoelectric thin films;Robbins,1991

4. Electrostatic combdrive microactuators with sub-micron gaps;Furuhata;Trans. Inst. Elect. Eng. Jpn.,1992

5. A silicon microvalve with combined electromagnetic/electrostatic actuation;Bosch;Sensors and Actuators A,1993

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