1. The State Key Laboratory of Tribology and Institute of Manufacturing Engineering, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China;
2. Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipments and Control, Tsinghua University, Beijing 100084, China;
3. Fraunhofer-Institut fuer Werkzeugmaschinen und Umformtechnik (IWU), Reichenhainer Str. 88, Chemnitz D-09126, Germany e-mail:
4. Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipments and Control, Tsinghua University, Beijing 100084, China e-mail:
5. The State Key Laboratory of Tribology and Institute of Manufacturing Engineering, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
6. Fraunhofer-Institut fuer Werkzeugmaschinen und Umformtechnik (IWU), Reichenhainer Str. 88, Chemnitz D-09126, Germany